Patterned wafer containing logic dies and 3D NAND memory dies, (f) X-ray ptychography, (g) THz wave-based defect inspection system, and (h) Coherent Fourier scatterometry techniques using ...

Photolithography uses light to transfer a pattern of features from a mask to a light-sensitive chemical photoresist on a semiconductor wafer. As the pattern is transferred, it is reduced in scale ...

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that includes un-patterned wafer quality, 3D metrology spanning chip ...