EurekAlert!2y
Schematic of various optical systems that are capable of tackling the diverse challenges in patterned defect inspection (IMAGE)
Patterned wafer containing logic dies and 3D NAND memory dies, (f) X-ray ptychography, (g) THz wave-based defect inspection system, and (h) Coherent Fourier scatterometry techniques using ...
Nature1mon
Lithography gets extreme
Photolithography uses light to transfer a pattern of features from a mask to a light-sensitive chemical photoresist on a semiconductor wafer. As the pattern is transferred, it is reduced in scale ...
Optics5y
Kaufman and Robinson, Inc.
Typical material processes include the precision deposition of thin films, remote plasma etching of patterned wafers, and nanometer-scale modification of surfaces. KRI® is respected across the globe ...
Business Wire19d
Onto Innovation Advances Process Control Suite for 3D Interconnect Yields
About Onto Innovation Inc. Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that includes un-patterned wafer quality ...