3). Double patterning is, as its name implies, a two-stage process. In the first step, the first mask pattern is projected onto the photoresist. The wafer is then processed as usual and a second ...

Wafers are oriented on a notch finder, with wafer ID captured by a Cognex OCR camera. Wafers are then inspected at a custom wafer pocket mounted on an open-frame X-Y stage assembly. The wafer on the ...