Patterned wafer containing logic dies and 3D NAND memory dies, (f) X-ray ptychography, (g) THz wave-based defect inspection system, and (h) Coherent Fourier scatterometry techniques using ...

The rapid advancement of the electronics industry is opening new possibilities for the development of increasingly advanced ...

Photolithography uses light to transfer a pattern of features from a mask to a light-sensitive chemical photoresist on a semiconductor wafer. As the pattern is transferred, it is reduced in scale ...

Onto Innovation is a leader in process control, combining global scale with an expanded portfolio of leading-edge technologies that includes un-patterned wafer quality, 3D metrology spanning chip ...